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N. Yahata
N. Yahata
Arai Helmet
Transition metal
Plasma
Scanning electron microscope
Copper
Plasma-enhanced chemical vapor deposition
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6
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A Method for Copper Film Deposition with Cl2 Plasma
2004
Journal of The Electrochemical Society
Hitoshi Sakamoto
Yuzuru Ogura
Y. Ooba
T. Nishimori
N. Yahata
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