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Winand Slingenbergh

University of Groningen

4

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Selective functionalization of patterned glass surfaces

2014 Journal of Materials Chemistry B
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Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair

2014 Journal of Vacuum Science & Technology B
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Evaluation of mask repair strategies via focused electron, helium, and neon beam induced processing for EUV applications

2014 Proceedings of SPIE
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Selective Functionalization of Tailored Nanostructures

2012 ACS Nano
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