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G. Pattanaik
G. Pattanaik
Monolayer
selective deposition
Chemical engineering
Dielectric
Metal
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Advanced Damascene integration using selective deposition of barrier metal with Self Assemble Monolayer
2021
IITC | International Interconnect Technology Conference
Hiroaki Kawasaki
M. Iwashita
H. Warashina
Hiroyuki Nagai
K. Iwai
H. Komatsu
Y Ozaki
G. Pattanaik
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