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Eric Chih-Fang Liu
Eric Chih-Fang Liu
Engineering
Manufacturing engineering
integrated circuit manufacturing
Optoelectronics
Extreme ultraviolet lithography
2
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LER reduction strategies for EUV self-aligned double patterning (SADP)
2021
Eric Chih-Fang Liu
Katie Lutker-Lee
Qiaowei Lou
Angelique Raley
Peter Biolsi
Ya-Ming Chen
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Invited) Spatial ALD Challenges and Opportunities in Advanced Integrated Circuit Manufacturing
2020
David L. OMeara
Anthony Dip
Masanobu Igeta
Robert D. Clark
Hisashi Higuchi
Eric Chih-Fang Liu
Angelique Raley
Jeffrey S. Smith
Kandabarra Tapily
Dina H. Triyoso
Gert J. Leusink
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