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Masanobu Igeta
Masanobu Igeta
Materials science
Chemistry
Composite material
Polymer science
Physical chemistry
5
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Invited) Spatial ALD Challenges and Opportunities in Advanced Integrated Circuit Manufacturing
2020
David L. OMeara
Anthony Dip
Masanobu Igeta
Robert D. Clark
Hisashi Higuchi
Eric Chih-Fang Liu
Angelique Raley
Jeffrey S. Smith
Kandabarra Tapily
Dina H. Triyoso
Gert J. Leusink
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Procede de nitruration de film isolant, dispositif a semi-conducteur et son procede de production et dispositif et procede de traitement de surface
2002
Masanobu Igeta
Shintaro Aoyama
Hiroshi Shinriki
Tsuyoshi Takahashi
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Oxidation and Oxinitridation by using Vacume Ultra Violet light for Intrfacial layer formation
2002
Technical report of IEICE. SDM
S. Aoyama
Masanobu Igeta
H. Shinriki
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A process for forming an insulating film and for substratverabeitungsvorrichtung
2001
Shintaro Aoyama
Hiroshi Shinriki
Masanobu Igeta
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Procede de formation d'un film d'isolant de grille, appareil pour la formation d'un film d'isolant de grille et outil combine
2001
Hideki Kiryu
Tsuyoshi Takahashi
Shintaro Aoyama
Hiroshi Shinriki
Masanobu Igeta
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