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Micromachining of PDMS for microfluidics using laser produced plasma EUV radiation
Micromachining of PDMS for microfluidics using laser produced plasma EUV radiation
2016
Hikari Urai
Mizuki Ogawa
Shintaro Fukami
Shuichi Torii
Tetsuya Makimura
Daisuke Nakamura
Akihiko Takahashi
Tatsuo Okada
Hiroyuki Niino
Keywords:
Plasma
Microfluidics
Laser
Radiation
Surface micromachining
Polydimethylsiloxane
Analytical chemistry
Extreme ultraviolet lithography
Materials science
Optoelectronics
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