A precision beta gauge using a plastic scintillator and photomultiplier detector

Abstract We describe the use of a plastic scintillator photomultiplier detector combination in applications involving the precision beta-gauge measurement of small mass deposits of thin substrates. The requisite precision (±2 μg / cm 2 ) places stringent requirements on the beta-particle counter and associated electronics. The scintillator based system is shown to be equivalent if not superior to previously employed semiconductor detectors with respect to long-term counting stability.