Old Web
English
Sign In
Acemap
>
Paper
>
Surface state improvement in GaN deep etching for power electronics applications
Surface state improvement in GaN deep etching for power electronics applications
2015
Nicolas Gosset
Floriane Leroy
Thomas Tillocher
Julien Ladroue
Philippe Lefaucheux
Mohamed Boufnichel
Remi Dussart
Keywords:
Electronic engineering
Etching
Power electronics
Optoelectronics
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]