A Miniaturised Fabry Perot AFM Sensor

A new type of a miniaturised AFM sensor is presented. The set-up is a hybrid consisting of a thin film cantilever with integrated Fabry Perot intererometer and a LIGA microoptical bench. The small design makes it possible to integrate the AFM sensor in a piezo tube. The transparent mirror of the Fabry Perot cantilever is optimised using our detection system without cantilever and measuring the interference signal of a thin metal and a totally reflecting metal layer. First measurements with the new AFM sensor on a nickel grating with a periodicity of 330nm and a height of 3nm are presented.