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Low Temperature and High-Quality Neutral Beam Enhanced Atomic Layer Deposition of Hafnium Dioxide
Low Temperature and High-Quality Neutral Beam Enhanced Atomic Layer Deposition of Hafnium Dioxide
2021
Ge Beibei
Daisuke Ohori
Hua Hsuan Chen
Takuya Ozaki
Kazuhiko Endo
Seiji Samukawa
Keywords:
Optoelectronics
Materials science
quality
Beam (structure)
Hafnium dioxide
Atomic layer deposition
Correction
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