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Silicon on Insulator CMOS with Hybrid Crystal Orientation Using Double Wafer Bonding
Silicon on Insulator CMOS with Hybrid Crystal Orientation Using Double Wafer Bonding
2006
Kevin K. Chan
M. Yang
Leathen Shi
Arvind Kumar
J. A. Ott
J. Patel
R. Schultz
H. Kry
Y. Zhang
E. Sikorski
W. Graham
B. To
S. Medd
D. Canaperi
J. Newbury
C. Scerbo
R. Meyer
C. D'Emic
Meikei Ieong
Keywords:
Electronic engineering
Physics
Anodic bonding
Silicon on sapphire
Silicon on insulator
Hybrid silicon laser
CMOS
Etching (microfabrication)
Wafer bonding
Etching
Optoelectronics
Correction
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