Enhance Transfer Performance for High Throughput Tools FD-O-053 by Control Scenario

With the advance of semiconductor manufacturing technology, tools Process Time (PT) will become shorter and shorter. But Automated Material Handling System (AMHS) has throughput limitation to affect tool performance. It may directly make tools while idle for waiting FOUP transportation and indirectly affects how many tools to purchase in Fab. This problem often happens as short PT tools. (i.e. PT < Transfer Time), single load port tools, and high throughput bay line with vehicle traffic jam, etc. In this paper, we present some approaches to improve it through shortening Transfer Time. After the simulation in real Fab, these approaches have been proven to increase 6� 15% of high throughput tools utilization. Index Term: high throughput, local buffer, AMHS.