Electrode architecture in tuning room temperature sensing kinetics of nanomicrointegrated hydrogen sensor

A diffusion model is proposed for elucidating the effect of interelectrode distance modulation on conductance change of a nanomicrointegrated hydrogen sensor at room temperature. Both theoretical and experimental results showed a faster response upon exposure to hydrogen when sensor electrode gap was smaller. Also, a linear increase in the sensor sensitivity from 500 to 80 000 was observed on increasing the electrode spacing from 2to20μm. The improvement in sensitivity is attributed to the higher reactive sites available for the gaseous species to react on the sensor surface.