Mixed regime simulation in MEMS

In order to verify and optimize the performance of MEMS devices, simulators are required which can rapidly analyze complicated three dimensional structures. One approach to improving simulation speed is to develop techniques which allow designers to improve simulation efficiency by using simpler physical approximations in parts of the device. Here,such a mixed regime approach is described to accelerating a matriximplicit multi-level Newton method for electromechanical simulation. In particular, a general algorithm is described which allows parts of the mechanical structure to be approximated as as rigid, as each rigid body contributes only six degrees of freedom. Results are presented to show that the method can perform accurate 3-D simulation of a complete electrostatic comb drive accelerometer in under ten minutes. Thesis Supervisor: Jacob White Title: Professor of Electrical Engineering and Computer Science Acknowledgments First of all I would like to thank my advisor Professor Jacob White for his deep insight, direction and help on the theoretical and implementation aspects he provided throughout my research. I would also like express my thanks for Narayan Aluru for helping me out on the finite element elastostatics and coupled domain simulation aspects of my research. I would like to very much acknowledge the help I received from my group mates at various stages of my research. Finally I wish to express my thanks towards Professor Kevin Amaratunga who read this thesis and suggested corrections while pointing out mistakes..