Quality Enhancement of Centered Hole Thin Film Disc Resonator by Drilled Phononic crystals

The new approach of silicon based phononic crystal with drilling across its two sides is proposed to control the acoustic waves. A very large band gap is obtained by one dimensional 1D and two dimensional 2D drilled phononic crystal in desired frequency ranges. When these novel phononic crystals is employed to proposed centered hole thin film piezoelectric disc resonator the anchor loss reduced and quality factor $Q$ improved from 92100 to 127 billion at operating frequency 178.07MHz, and low vibrational displacement is obtained based on Finite Element Analysis simulation. It is observed that this novel PnC improve the quality of resonator with better performance.