Synthesis and properties of CrNx/amorphous-WC nanocomposites prepared using hybrid arc ion plating and direct current magnetron sputtering

Abstract Hybrid deposition method was used to prepare CrN x /amorphous-WC (CrN x /a-WC) films. The effect of the arc ion plating and direct current magnetron sputtering on the changes in microstructure and properties such as hardness and thermal stability were studied. The amorphous WC phase of the CrN x /a-WC films was confirmed by X-ray photoelectron spectroscopy and high resolution transmission electron microscopy. A bi-phase nanocomposite kinetic model and the Koehler's theory were used to explain the growth mechanism of CrN x /a-WC films. A superhard superlattice Cr 2 N/a-WC film with hardness up to ~ 48 GPa was abtained. The CrN/a-WC films displayed better resistance to oxidation than pure CrN and CrN-based films. As such, CrN x /a-WC nanocomposite films are very promising for high-speed drying machines and other high-temperature applications.