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Fabrication of AlN Templates with Dislocation Density of 10 7 cm -2 by High-temperature Annealing
Fabrication of AlN Templates with Dislocation Density of 10 7 cm -2 by High-temperature Annealing
2021
Hideto Miyake
Kanako Shojiki
Shiyu Xiao
Kenjiro Uesugi
Shigeyuki Kuboya
Keywords:
Dislocation
Optoelectronics
Annealing (metallurgy)
Fabrication
Template
nitride semiconductors
Materials science
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