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Towards the implementation of atomic layer deposited In 2 O 3
Towards the implementation of atomic layer deposited In 2 O 3
2017
Yinghuan Kuang
Bart Macco
Bora Karasulu
Chaitanya Krishna Ande
P.C.P. Bronsveld
Verheijen
Y. Wu
W. M. M. Kessels
R.E.I. Schropp
Keywords:
Atomic physics
Atomic layer epitaxy
Materials science
Optoelectronics
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