Compact quasi planar silicon bandpass filters based on metallic periodic structure for Q and V band applications

Small size filters are presented here, they are based on a periodic lattice of metallic holes that form coupled silicon resonators. The first structure is a filter at 45 GHz with 8% bandwidth at -3 db, realized on 430 /spl mu/m thick high resistivity silicon wafer using a wet etching process. I/O CPW feeds are printed on the top of the substrate. The second structure is a filter at 58.5 GHz with 2% bandwidth at -3 db. The via holes lattice is realized with deep RIE process and the filter is bonded to a PCB with a flip chip technique. Based on the same principle, a CPW to waveguide transition is finally presented.