Laser deposition of thin films of high Tc superconductors : in situ analysis of the transient species formed in the plume and surface diagnostics of the deposited material

1993 
Abstract The present work reports some results on the laser deposition technique of high T c superconducting films. In situ analysis of transient species formed in the plume and surface diagnostic of the deposited Bi-Sr-Ca-Cu-O (BSCCO) thin films has been performed. It has been ascertained that mixed oxide cluster ions are produced in the plume together with neutral and ionized atoms of constituent material. The effect of annealing parameters on the structure and quality of deposited thin films of BSCCO is reported and discussed.
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