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Differential Interference Contrast Microscopy of Defects in As-Grown and Annealed Si Wafers
Differential Interference Contrast Microscopy of Defects in As-Grown and Annealed Si Wafers
1997
Marie-Astrid Trauwaert
Jan Vanhellemont
U. Lambert
D. Gräf
Karine Kenis
Paul W. Mertens
Marc Heyns
Keywords:
Interference (wave propagation)
Composite material
Differential interference contrast microscopy
Annealing (metallurgy)
Wafer
Analytical chemistry
Materials science
Silicon
Correction
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