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Micro-Nano Lithography by MeV Ion Beam Writing
Micro-Nano Lithography by MeV Ion Beam Writing
2009
Katsuyoshi Takano
Takahiro Satoh
Yasuyuki Ishii
Tomihiro Kamiya
Takeru Ohkubo
Masaki Sugimoto
Masashi Koka
Hiroyuki Nishikawa
Syu Seki
Keywords:
Ion beam
X-ray lithography
Analytical chemistry
Nano-
Lithography
Extreme ultraviolet lithography
Materials science
micro nano
Optoelectronics
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