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Corrosion of Co in BEOL interconnects in dilute HF solution
Corrosion of Co in BEOL interconnects in dilute HF solution
2018
Yuya Akanishi
Els Kesters
Quoc Toan Le
Frank Holsteyns
Keywords:
Corrosion
Copper
Metallurgy
Cobalt
Galvanic corrosion
Materials science
Oxygen saturation
Correction
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