Shape control using hologram-assisted talbot lithography

In recent years, unique functions of nano-periodic structures have attracted much attention, and there is a need for processing techniques with high processing efficiency and flexibility. Therefore, we focused on Talbot lithography, which has excellent processing efficiency for periodic structures. In this paper, we use hologram-assisted Talbot lithography to improve the processing flexibility of Talbot lithography. Hologram-assisted Talbot lithography is a method to improve the processing flexibility of structures by using CNN to estimate the incident light distribution. In order to improve the accuracy of the hologram-assisted Talbot lithography method for controlling periodic structures, we studied the learning of CNN. And we showed that the shape and period of the structure can be controlled by using CNN.