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IRPS 2013 tutorial: Reliability of Low-k Interconnect Dielectrics in Advanced CMOS Technologies.
IRPS 2013 tutorial: Reliability of Low-k Interconnect Dielectrics in Advanced CMOS Technologies.
2013
Gad S Haase
Keywords:
Dielectric
Computer engineering
CMOS
Materials science
Electronic engineering
Electrical engineering
Interconnection
Computer science
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