Old Web
English
Sign In
Acemap
>
Paper
>
Heating characteristics of the minimal furnace that can irradiate laser from the backside of a wafer
Heating characteristics of the minimal furnace that can irradiate laser from the backside of a wafer
2016
Kazushige Sato
Haruki Toonoe
Takashi Chiba
Masao Terada
Shin-Ichi Ikeda
Sommawan Khumpuang
Shiro Hara
Keywords:
Laser
Wafer
Analytical chemistry
Materials science
Optoelectronics
laser heating
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]