X-Ray Digital Image Plate Detector for Phase and Texture Analyses of Thin Tantalum Films

Abstract : An x-ray digital image plate detector was used to conduct phase and texture analyses of thin tantalum films in several seconds using a conventional, fixed copper anode, x%ay tube. This plate imaging method provides an expansion of grazing-incidence x-ray diffraction, out of the goniometer plane. The method exploits Laue flat plate geometries and "tall" Debye-Scherrer camera methods. The film studied shows 200-nm of sputter-deposited, (alpha-phase tantalum, showing fiber texture grown on a silicon (100) substrate. Image plate texture information was presented, and confirmed through comparison with conventional pole figure and 20 Bragg analyses.