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Study of Si-SOI/SiO 2 /4H-SiC direct wafer bonding
Study of Si-SOI/SiO 2 /4H-SiC direct wafer bonding
2021
Kazuya Kawamura
Tatsuya Meguro
Masayuki Tsutsumi
Takeshi Ohshima
Yasunori Tanaka
Shin-Ichiro Kuroki
Keywords:
Silicon on insulator
Semiconductor
Materials science
Optoelectronics
Wafer bonding
Correction
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