MEMS-based deformable mirrors in industrial laser systems

Recent advancements in MEMS deformable mirrors (DM) make them suitable for use in industrial laser systems. This paper presents results from DMs used to improve beam quality and beam-steering/shaping. It also describes methods to improve power handling and longevity that led to successful 1000-hour operational testing of a 3.5 mm aperture PTT111 MEMS DM while exposed to up to 17 W of UV laser power.