Polymer/silica hybrid waveguide temperature sensor based on asymmetric Mach-Zehnder interferometer

A highly sensitive waveguide temperature sensor based on asymmetric Mach–Zehnder interferometer was designed and experimentally demonstrated. The interferometer is based on the polymer/silica hybrid waveguide structure, and Norland Optical Adhesive 73 (NOA 73) was employed as the waveguide core to enhance the temperature sensitivity. The influence of the different length differences between the two interferometer arms on the sensitivity of the sensor was systemically studied. It is shown that the maximum temperature sensitivity of −431 pm °C−1 can be obtained in the range of 25 °C−75 °C, while the length difference is 92 μm. Moreover, the temperature sensitivity contributions from different core materials were also investigated experimentally. It is shown that the waveguide material and microstructure of the device have significant influences on the sensitivity of the waveguide temperature sensor.