Demographics and Asset Markets

A method of developing grey-splices for use in an electron beam exposure apparatus subdivides rectangles of which a desired pattern is formed and which lie in sub-field overlap zones into sections and examines each section of the sub-field overlap zone to determine the best candidate for greying in order to avoid blooming due to overexposure and to minimize the possibility of exposure discontinuity. A data structure called a greytable list is accumulated to represent the portions of rectangles which lie in each section. Processing of each rectangle is minimized and groups of rectangles are processed in chains to increase the throughput of the system. The e-beam exposure apparatus is operated at optimal efficiency by minimizing the number of exposure spots which are greyed.