Low-cost vertical taper for highly efficient light in-coupling in bimodal nanointerferometric waveguide biosensors

This research was funded by Accion Estrategica Economia y Sociedad Digital (AEESD)-Ministerio de Industria, Energia y Turismo (MINETUR). The ICN2 is funded by the CERCA programme/Generalitat de Catalunya. The ICN2 is supported by the Severo Ochoa programme of the Spanish Ministry of Economy, Industry and Competitiveness (MINECO, grant SEV-2013-0295). This work has made use of the Spanish ICTS Network MICRONANOFABS partially supported by MEINCOM. D. Grajales acknowledges CONACYT (Mexican Council of Science and Technology) CVU 397275, contract SICOB 218103.