Wideband MZI Based Thermo-Optic Switch with Slab Integrated Microheater in SOI

Silicon waveguide slab integrated microheater is proposed in MZI configuration for efficient and broadband thermo-optic switch. Fabricated devices exhibit fast switching $(\sim 5\mu \mathrm{s})$ and extinction of > 20-dB over a broad wavelength range (1520–1620 nm).