Fast fabrication of single-substrate inorganic all-solid state smart window device based on WO_3 and NiOx and sdudy on its performance

In this paper we introduce a effective method to prepare amorphous-porous WO3,amorphous LiNbO3,and nano-microcrystalline NiOx films by magnetron sputtering and a cooling apparatus based on liquid nitrogen.Therefore,using the cooling apparatus,We have fabricated single-substrate inorganic all-solid state smart window device consisting of G/ITO/NiOx/LiNbO3/WO3/ITO.The experimental results show that in the visible range between 400 and 800nm,transmittance average of its bleached state after 1000th cycle is 63.0%,whereas transmittance average of its colored state after 1000th cycle is 10.6%.This preliminary work indicates that the method of cooling substrate should be a effective means to fabricate inorganic all-solid state smart window device having excellent electrochromic performance.