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Focused anode layer thruster for ion beam figuring
Focused anode layer thruster for ion beam figuring
2020
Oleksii Girka
Soo Ouk Jang
Kiyong Lee
Kang Il Lee
Yong-Sup Choi
Keywords:
Ion beam
Materials science
Figuring
Optoelectronics
Anode
layer
Correction
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