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Automatic tuning of an optical ultrasonic microsensor based on the Fabry-Perot interferometer
Automatic tuning of an optical ultrasonic microsensor based on the Fabry-Perot interferometer
2004
W. Noell
H. Asanuma
H Ohishi
H. Niitsuma
Keywords:
Fabry–Pérot interferometer
Ultrasonic sensor
Optics
Materials science
automatic tuning
Correction
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