Laser annealing apparatus

The present invention provides a laser annealing equipment. The laser annealing device is disposed within the process chamber and the process chamber comprising a chamber window that is passed through a laser beam, includes a chuck (chuck) having a top surface on which a substrate is loaded. Here, the chuck is smaller than the width of the loading board width. By this, it is possible to prevent during the laser annealing process, which chuck is damaged.