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High quality AlN film on sapphire prepared by two step sputtering-annealing
High quality AlN film on sapphire prepared by two step sputtering-annealing
2020
Ding Wang
Kenjiro Uesugi
Shiyu Xiao
Yuta Tezen
Kenji Norimatsu
Kanako Shojiki
Shigeyuki Kuboya
Hideto Miyake
Keywords:
Optoelectronics
Materials science
Annealing (metallurgy)
Sputtering
Sapphire
two step
Correction
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