Tunable dual-mode ring filter based on BiCMOS embedded MEMS in V-band

This paper presents the design of a fully integrated tunable filter implemented in SiGe-BiCMOS technology. The narrow bandpass filter (12%) is aimed at addressing two operating frequencies at 56 GHz and 74 GHz. A synthesis is proposed to control the nominal filter as well as tunability which is obtained by the use of embedded MEMs. A good agreement between electromagnetic simulation and measurement is obtained which proves the quality of both the proposed concept and the technological process.