Interferometric method of measuring external cylindricalsurfaces
2020
A new method of measuring external cylindrical surfaces is proposed,
making use of a ring beam transform unit. The unit is composed of three
cone mirrors, with which a parallel beam can be transformed into annular
and convergent beams. The method has advantages over classic methods: It
avoids physical contact with the cylinder surface and is fast and
stitching-free. In experiments using a dynamic interferometer to
demonstrate the feasibility of the method, the RMS difference of the axis
contour from results using a Luphoscan is 0.0282 µm, while the roundness
difference of the circumferential contour is 0.0962 µm.
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