CONSIDERATION OF TWO DIMENSIONAL SURFACE ROUGHNESSES IN QUANTITATIVE XPS ANALYSIS

The effect of two dimensional surface roughnesses on the intensities of XPS peaks have been investigated. The following models have been studied: square base pits with side walls perpendicular to the surface in chequered position, square base pyramid shaped pits touching each other by their edges, square base pyramids touching each other by their bottom edges, and spheres in closest packing with a planar tangent surface. On the latter model also the effect of ion etching has been studied. The application of the results are demonstrated on two quantitative surface analytical problems.