Recent Developments in MEMS Speaker Technology

A sizable market with respect to portable audio calls for greater demand in MEMS speaker technology and manufacturing. A proper selection of electrostatic/electromagnetic actuators in a MEMS speaker gives rise to improved electromechanical efficiency. Summarizing the most recent developments could help in understanding the current technology and its scope. In this paper, several design selections and various types of MEMS speakers which are integrated with necessary components and circuitry in the same substrate are surveyed.