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Fabrication of AlGaN films by sputtering deposition and face-to-face annealing
Fabrication of AlGaN films by sputtering deposition and face-to-face annealing
2021
Shigeyuki Kuboya
Sho Iwayama
Kenjiro Uesugi
Kanako Shojiki
Kenji Norimatsu
Hideto Miyake
Keywords:
Fabrication
Sputter deposition
Materials science
nitride semiconductors
annealing
Optoelectronics
Correction
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