Shape inspection method, the shape inspection apparatus and program

2016 
A more simple and objectively shape inspection method capable of adjusting the brightness and thickness of the optical cutting line in the optical section image, to provide a shape inspection apparatus and a program. Shape inspection method according to the present invention includes, by irradiating a linear laser beam on the object surface from the laser light source, using the light-section method by imaging the optical cutting line by the laser beam on the object surface by an imaging apparatus index calculating an optical section image generation step of generating a light section image that is, the brightness index value representing the brightness of the thickness index and the light section lines representing the thickness of the light section line at the optical section image, respectively value calculation step, a setting changing step of changing at least one of setting the laser light source or the imaging device to be included within the predetermined range, each predetermined uniquely thickness index value and the brightness index value, thickness index and the brightness index value is respectively performs image processing with respect to the optical section image after began to be included within the predetermined range, comprising a shape inspection step for inspecting the shape of the object surface. .The 12
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