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Total Electron Yield Mapping of Electronic Device Features via Measurement of X-Ray Beam-Induced Currents
Total Electron Yield Mapping of Electronic Device Features via Measurement of X-Ray Beam-Induced Currents
2019
William A. Hubbard
Jared J. Lodico
Brian Zutter
David Shapiro
Yuan-Hung Lo
Arjun Rana
Drew Morrill
Christian Gentry
Ho-Leung Chan
B. C. Regan
Keywords:
Analytical chemistry
Materials science
Beam (structure)
Optics
Electron
Yield mapping
X-ray
x ray beam
Atomic physics
electron yield
Correction
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