Diffusivity of Pt in BaxSrl-xTiO3 by XPS Compositional Depth Profiling

This paper investigates the diffusion of Pt into polycrystalline thin-film BaxSr1-xTiO3 synthesized by sputter deposition and metal-organic deposition (MOD). Comparison of these two sets of films demonstrated that no remarkable interdiffusion was observed at the Pt/BSTO interface for the sputtered films. This is contrary to the films prepared by MOD which shows Pt has thoroughly diffused into BSTO films. The deeper diffusion of Pt into BSTO films prepared by MOD is attributed to die microstructure of these films. The effects of die diffusion on some physical properties have been discussed. Moreover, the effect of the heat-treatment on the diffusivity and other parameters is discussed