Soft Magnetic Properties of Fe-Co/ZnO Multilayer Films

The dependence of the soft magnetic properties of sputtered Fe-Co/ZnO multilayer films on the film thickness and composition has been investigated. The coercivity decreases with decreasing average crystal grain size D, particularly in the range from 9~17 nm, for all multilayer films except Co/ZnO. A coercivity H c = 160 A/m and effective permeability ? e (10 MHz) = 800 were obtained for Fe/ZnO and 24wt% Co-bal.Fe/ZnO multilayer films with D = 2~3 nm.