Big Data Curation for Analytics within the Cyber-Physical Manufacturing Metrology Model (CPM3)

Abstract This paper presents recent research on enabling cloud-based model for big data analytics within the Cyber-Physical Manufacturing Metrology Model (CPM3). We will first briefly review a physics-based concept for converting optical metrology data into useful information that can easily be communicated and stored on the cloud for subsequent data mining. We also propose a novel organization of the compressed metrology data on the cloud, enabling logarithmically accelerated searching of databases and thus providing dramatic advantages for data mining. Capabilities of the new concepts of inspection data curation are demonstrated in defect detection using measurements of nanopatterned wafer surfaces.