Plasma parameter diagnosis using hydrogen emission spectra of a quartz-chamber 2.45 GHz ECRIS at Peking University
2018
A quartz-chamber 2.45 GHz electron cyclotron resonance ion source
(ECRIS) was designed for diagnostic purposes at Peking University
[Patent Number: ZL 201110026605.4]. This ion source can produce a
maximum 84 mA hydrogen ion beam at 50 kV with a duty
factor of 10%. The root-mean-square (RMS) emittance of this beam is
less than 0.12π mm mrad. In our initial work, the electron temperature
and electron density inside the plasma chamber had been measured with
the line intensity ratio of noble gases. Based on these results, the
atomic and molecular emission spectra of hydrogen were applied to
determine the dissociation degree of hydrogen and the vibrational
temperature of hydrogen molecules in the ground state, respectively.
Measurements were performed at gas pressures from 4×10 −4 to 1× 10 −3 Pa and at input
peak RF power ranging from 1000 to 1800 W. The dissociation
degree of hydrogen in the range of 0.5%-10% and the vibrational temperature
of hydrogen molecules in the ground state in the range of 3500- 8500 K were obtained. The plasma processes inside this
ECRIS chamber were discussed based on these results.
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