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Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure
Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure
2020
Sora Lee
Yejin Shon
Dong-gil Kim
Deuk-Chul Kwon
HeeHwan Choe
Keywords:
Atomic physics
simulation based
Inductively coupled plasma
Fluid simulation
electron energy distribution function
Materials science
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